Wafer Alignment Sensor
LED based sensor for detecting and positioning a flat on a semiconductor wafer
The HD-T1 series of LED wafer alignment sensors allows for the use of a safe LED light source for high-precision wafer positioning. No extra safety measures are necessary as with laser diode equivalents. Also, it has a high resolution of 30 micron for accurate measurement. Installation is easy with a quick connect sensor head and a fixed emitter and receiver for a consistently stable sensing axis. Lastly, shift and span adjustment functions are built-in to the controller for optimum control of the analog output.
