M Series Semiconductor Sensors
Wafer Address Sensor
Multi channel sensor for one step wafer addressing within a foup
The M series of wafer address sensors allows for non-contact sensing of all wafers in a foup simultaneously. It is not affected by wafer color and is available for 8 inch (25 or 26 pcs) or 6 inch (25 pcs) wafer sizes. Also, several sensors can be wired up to the same set of PLC inputs by utilizing an "output invalid" option that halts the output of one sensor so that another can be monitored individually.
