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Specific to the semiconductor industry, these sensors are designed to simplify processes such as wafer alignment, positioning, and addressing.

With these solutions, automating semiconductor processes has never been easier. Explore the models listed below to find the best sensor for your needs.

Semiconductor Sensors
M-DW1
Wafer Mapping Sensor
The M-DW1 wafer-mapping sensor is a perfect alternative to laser wafer-mapping solutions. By employing a safe LED light source, extra safety considerations that are associated with laser type products are eliminated. A two segment receiving ele...
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M
Wafer Address Sensor
The M series of wafer address sensors allows for non-contact sensing of all wafers in a foup simultaneously. It is not affected by wafer color and is available for 8 inch (25 or 26 pcs) or 6 inch (25 pcs) wafer sizes. Also, several sensors can ...
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HD-T1
LED Type Wafer Alignment Sensor
The HD-T1 series of LED wafer alignment sensors allows for the use of a safe LED light source for high-precision wafer positioning. No extra safety measures are necessary as with laser diode equivalents. Also, it has a high resolution of 30 mi...
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