Wafer Address Sensor

The M series of wafer address sensors allows for non-contact sensing of all wafers in a foup simultaneously. It is not affected by wafer color and is available for 8 inch (25 or 26 pcs) or 6 inch (25 pcs) wafer sizes. Also, several sensors can be wired up to the same set of PLC inputs by utilizing an "output invalid" option that halts the output of one sensor so that another can be monitored individually.

M Models

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• Sensors

Currently viewing: M Sensors

Model Name	Type	Output Configuration	Wafer Pitch	Output Operation
Sort	Sort	Sort	Sort	Sort
M-625	6 Inch Wafer, 25 pcs	25 NPN	4.76mm	Dark-ON
M-825	8 Inch Wafer, 25 pcs	25 NPN	6.35mm	Dark-ON
M-826	8 Inch, Wafer, 26 pcs	26 NPN	6.35mm	Dark-ON